2 November 1993 Optical and structural properties of composite films prepared by co-evaporation of TiO2 and MgF2
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Abstract
The optical and structural properties of TiO2-MgF2 mixed films prepared by coevaporation with ion-assisted deposition have been investigated. The composition of coevaporated TiO2-MgF2 mixed films can be tuned by controlling the relative deposition rates of the two sources. Most of the films with thicknesses less than 500 nm are found to be homogeneous in optical properties. The optical and structural properties of the mixed films change from MgF2-dominant to TiO2-dominant as the TiO2 content in the mixed film increases. The dependence of the refractive index with composition can be fitted by Bottcher's formula at low TiO2 content and by Lorentz-Lorentz formula at high TiO2 content in the mixed films. An application of TiO2-MgF2 mixed films for the design and fabrication of antireflection coatings in the near infrared region has also been discussed.
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Rung-Ywan Tsai, Rung-Ywan Tsai, Chaur-Tsang Wei, Chaur-Tsang Wei, Fang Chung Ho, Fang Chung Ho, } "Optical and structural properties of composite films prepared by co-evaporation of TiO2 and MgF2", Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, (2 November 1993); doi: 10.1117/12.163548; https://doi.org/10.1117/12.163548
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