13 August 1993 Dynamical focusing electro-optical sensor system for measuring surface contours
Author Affiliations +
Proceedings Volume 2053, Optical Storage (ISOS '92); (1993) https://doi.org/10.1117/12.150666
Event: Optical Storage: Third International Symposium, 1992, Kunming, Yunnan Province, China
Abstract
A test unit is described which includes an automatic focusing device and a displacement sensor for lens movement. The resolution of the unit is 20 nm in the range of +/- 40 micrometers . In addition, a technique for ensuring the focal spot using the character of the laser diode is presented. This measurement principle can be widely used in the areas of precision manufacture, optical industry, and soft materials testing.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rong Gu, Chenjun Xu, Liming Lio, Guan-Qun Shen, "Dynamical focusing electro-optical sensor system for measuring surface contours", Proc. SPIE 2053, Optical Storage (ISOS '92), (13 August 1993); doi: 10.1117/12.150666; https://doi.org/10.1117/12.150666
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT

Focus Error Detection In Optical Data Storage Systems
Proceedings of SPIE (February 12 1980)
Design issues in optical data storage
Proceedings of SPIE (May 12 1995)
Diffractive optics for data storage
Proceedings of SPIE (May 12 1995)
Land/groove recording in MO systems
Proceedings of SPIE (September 08 1995)

Back to Top