13 August 1993 Measurement of surface roughness of optical disk substrates by differential polarization interferometry
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Proceedings Volume 2053, Optical Storage (ISOS '92); (1993) https://doi.org/10.1117/12.150655
Event: Optical Storage: Third International Symposium, 1992, Kunming, Yunnan Province, China
Abstract
This paper proposes a new interferometer to measure the roughness of optical disk substrates, which applies the principle of shearing interferometry and uses a Faraday modulator to detect the phase between two polarized beams. The instrument can produce surface probe and other statistical data with a height sensitivity of 2 nm and a lateral resolution of 1.2 micrometers . It has excellent stability even under vibration conditions, and rapid and noncontact measurements can be made without a special reference surface.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wendong Xu, Xishan Li, "Measurement of surface roughness of optical disk substrates by differential polarization interferometry", Proc. SPIE 2053, Optical Storage (ISOS '92), (13 August 1993); doi: 10.1117/12.150655; https://doi.org/10.1117/12.150655
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