13 August 1993 Measurement of surface roughness of optical disk substrates by differential polarization interferometry
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Proceedings Volume 2053, Optical Storage (ISOS '92); (1993) https://doi.org/10.1117/12.150655
Event: Optical Storage: Third International Symposium, 1992, Kunming, Yunnan Province, China
Abstract
This paper proposes a new interferometer to measure the roughness of optical disk substrates, which applies the principle of shearing interferometry and uses a Faraday modulator to detect the phase between two polarized beams. The instrument can produce surface probe and other statistical data with a height sensitivity of 2 nm and a lateral resolution of 1.2 micrometers . It has excellent stability even under vibration conditions, and rapid and noncontact measurements can be made without a special reference surface.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wendong Xu, Wendong Xu, Xishan Li, Xishan Li, } "Measurement of surface roughness of optical disk substrates by differential polarization interferometry", Proc. SPIE 2053, Optical Storage (ISOS '92), (13 August 1993); doi: 10.1117/12.150655; https://doi.org/10.1117/12.150655
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