High-speed precision UV drilling with frequency-doubled copper vapor lasers

Donald J. Ramsay; Alison C. J. Glover; David W. Coutts; James A. Piper

doi:10.1117/12.167594

1 February 1994 High-speed precision UV drilling with frequency-doubled copper vapor lasers

Donald J. Ramsay, Alison C. J. Glover, David W. Coutts, James A. Piper

Proceedings Volume 2062, Lasers as Tools for Manufacturing; (1994) https://doi.org/10.1117/12.167594
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

The copper vapor laser (CVL) is an efficient, high average power, high pulse rate visible laser, emitting in the green and the yellow. Previous applications of CVLs have been limited to those requiring a high power visible laser source but with no specific need for high output beam quality. Recently we have made substantial progress in understanding the factors that influence CVL beam quality. As a result we are now able to achieve efficient non-linear frequency conversion to produce a number of ultraviolet wavelengths with near- diffraction limited beam quality. The high repetition rate and low divergence uv output of the frequency-doubled CVL makes it an attractive alternative to the excimer laser for a number of applications, including high-speed precision hole-drilling, cutting and scoring in polymers and for deep-uv photolithography. We report here recent developments that have led to efficient generation of uv wavelengths from copper vapor lasers and we demonstrate its potential as a laser source for high-speed precision ultraviolet micromachining.

Citation Download Citation

Donald J. Ramsay, Alison C. J. Glover, David W. Coutts, and James A. Piper "High-speed precision UV drilling with frequency-doubled copper vapor lasers", Proc. SPIE 2062, Lasers as Tools for Manufacturing, (1 February 1994); https://doi.org/10.1117/12.167594

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