Waveguide excimer lasers in combination with high-resolution imaging and precision motion control systems are capable of direct-write shaping of diamond and diamond-like materials. 3D structures can be produced by scanning the worksurface under the focused beam and varying the energy delivered to the worksurface through use of various exposure algorithms. Using this technique, we have produced microstructures in diamond that demonstrated high spatial resolution and good surface finish.
C. Paul Christensen,
"Micromachining of diamond substrates with waveguide excimer lasers", Proc. SPIE 2062, Lasers as Tools for Manufacturing, (1 February 1994); doi: 10.1117/12.167592; https://doi.org/10.1117/12.167592