15 March 1994 High speed, ultra-high resolution 3D laser scanner
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Proceedings Volume 2065, Optics, Illumination, and Image Sensing for Machine Vision VIII; (1994) https://doi.org/10.1117/12.169371
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States
Abstract
This paper describes a feasibility study done to demonstrate `ultra-high' resolution imaging with a triangulation-based 3D laser scanner. General requirements for micron-level 3D inspection applications are discussed, followed by a proposal of a laser triangulation-based system to address these requirements. Some fundamental limits and trade-offs of 3D imaging are reviewed, and methods for overcoming technical challenges are discussed. Finally, images from a prototype scanning system demonstrating sub-micron resolution at rates faster than 1 Mhz are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Donald J. Svetkoff, Donald J. Svetkoff, Donald B.T. Kilgus, Donald B.T. Kilgus, } "High speed, ultra-high resolution 3D laser scanner", Proc. SPIE 2065, Optics, Illumination, and Image Sensing for Machine Vision VIII, (15 March 1994); doi: 10.1117/12.169371; https://doi.org/10.1117/12.169371
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