15 March 1994 Video rate laser scanner: considerations on triangulation optics, detectors, and processing circuits
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Proceedings Volume 2065, Optics, Illumination, and Image Sensing for Machine Vision VIII; (1994) https://doi.org/10.1117/12.169370
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States
Abstract
This paper presents the design of a line scanner which simultaneously generates height and intensity data at video rate (10 MHz). The optical detection scheme uses double triangulation for height measurement. The telecentric scanning and small spot size provide a high lateral accuracy (20 micrometers ). Design rules are presented which facilitate an optimum selection of the position sensitive detectors (PSD). New technologies for PSD processing are described, enabling a significant performance improvement over conventional analogue or digital circuits. Height resolution (1:1000), and dynamic range (four decades) are limited only by the physical properties of the PSDs.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kees S. Kooijman, Kees S. Kooijman, Jef L. Horijon, Jef L. Horijon, } "Video rate laser scanner: considerations on triangulation optics, detectors, and processing circuits", Proc. SPIE 2065, Optics, Illumination, and Image Sensing for Machine Vision VIII, (15 March 1994); doi: 10.1117/12.169370; https://doi.org/10.1117/12.169370
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