22 October 1993 Multibeam holographic optical sensor for control of diamond turning
Author Affiliations +
Proceedings Volume 2066, Industrial Optical Sensing and Metrology: Applications and Integration; (1993) https://doi.org/10.1117/12.162101
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States
The purpose of this paper is to describe a new precision displacement sensor--Multi-Beam Holographic Optical Sensor (MBHOS) for control of diamond turning--with the use of holographic optical element (HOE) technology. MBHOS is actually an integrated sensor which serves as three sensors. It can be used with the function of a single sensor to be a feedback component in closed loop control system and it can be used in the differential mode to detect the angular components of the micro-tool servo motion and to eliminate or to minimize the vibration errors with the function of three sensors. The ir HOEs are made by using a computer generated hologram (CGH) method. A computer simulation method is used to analyze the performances of this integrated sensor system. The initial experimental results of the MBHOS are obtained. The MBHOS is both compact and inexpensive.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bao Hua Zhuang, Bao Hua Zhuang, Ji-Hua Zhang, Ji-Hua Zhang, Keqian Lu, Keqian Lu, Rongjiu Han, Rongjiu Han, } "Multibeam holographic optical sensor for control of diamond turning", Proc. SPIE 2066, Industrial Optical Sensing and Metrology: Applications and Integration, (22 October 1993); doi: 10.1117/12.162101; https://doi.org/10.1117/12.162101


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