Surface quality inspection using a laser beam with a regular dynamic interference pattern

Vladimir P. Ryabukho; Yuri A. Avetisyan; Andrey E. Grinevich; Dmitry A. Zimnyakov; Boris V. Feduleev; Vladimir L. Khomutov

doi:10.1117/12.162107

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22 October 1993 Surface quality inspection using a laser beam with a regular dynamic interference pattern

Vladimir P. Ryabukho; Yuri A. Avetisyan; Andrey E. Grinevich; Dmitry A. Zimnyakov; Boris V. Feduleev; Vladimir L. Khomutov

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Proceedings Volume 2066, Industrial Optical Sensing and Metrology: Applications and Integration; (1993) https://doi.org/10.1117/12.162107
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

A new testing method of the surface roughness of transparent and reflecting objects is discussed. The method is based on the usage of the probing laser beam with spatial modulation in the form of a regular interference pattern, and of the contrast change effect of the pattern in the scattered light depending on the tested surface roughness parameters. A theory of the technique is presented. Various types of devices for the dynamic interference field formation in the probing laser beam (on the basis of interferometers, acoustic-optical modulators, optical and holographic elements with a piezoelectric deflector) are considered. A specialized processor of dynamic interference signals has been used to convert the measured contrast values. The experimental results of surface roughness testing of television screens are presented. The possibility of the technique usage in small angle scattering investigations is discussed. Consideration is also given to the feasibility of the technique industrial application in the rapid testing of the products surface quality while in production.

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Vladimir P. Ryabukho, Yuri A. Avetisyan, Andrey E. Grinevich, Dmitry A. Zimnyakov, Boris V. Feduleev, and Vladimir L. Khomutov "Surface quality inspection using a laser beam with a regular dynamic interference pattern", Proc. SPIE 2066, Industrial Optical Sensing and Metrology: Applications and Integration, (22 October 1993); https://doi.org/10.1117/12.162107