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9 March 1994 Laser-annealed Fabry-Perot fiber optic temperature sensor
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Proceedings Volume 2070, Fiber Optic and Laser Sensors XI; (1994) https://doi.org/10.1117/12.169926
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States
Abstract
A fiber-optic temperature sensor has been fabricated by first sputtering a silicon film onto the end of an optical fiber. The approximately one-micrometer thick silicon film serves as a Fabry-Perot etalon whose resonant wavelengths change as a function of temperature. The silicon film is annealed in order to stabilize its structure. This will provide a sensor with acceptable long term stability. The use of wavelength encoding fiber optic sensors provides a high degree of immunity from cable and connector effects. The benefits of this technology include reduced volume and weight, reduced cost, and improved reliability.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jorge L. Sotomayor and Glenn Beheim "Laser-annealed Fabry-Perot fiber optic temperature sensor", Proc. SPIE 2070, Fiber Optic and Laser Sensors XI, (9 March 1994); https://doi.org/10.1117/12.169926
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