Fiber optic low-coherence Michelson interferometer for silicon growth measurement

Robert R. Michael Jr.; Christopher M. Lawson

doi:10.1117/12.166852

7 February 1994 Fiber optic low-coherence Michelson interferometer for silicon growth measurement

Robert R. Michael Jr., Christopher M. Lawson

Proceedings Volume 2072, Fiber Optic Physical Sensors in Manufacturing and Transportation; (1994) https://doi.org/10.1117/12.166852
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

We report on the use of optical low coherence reflectometry for silicon characterization. The measurement system uses a low coherence light source (edge-emitting LED) in conjunction with a fiber optic Michelson interferometer. This non-contact fiber optic measurement system has been used to measure silicon thickness and flatness to an accuracy of +/- 1.5 micrometers in the laboratory.

Citation Download Citation

Robert R. Michael Jr. and Christopher M. Lawson "Fiber optic low-coherence Michelson interferometer for silicon growth measurement", Proc. SPIE 2072, Fiber Optic Physical Sensors in Manufacturing and Transportation, (7 February 1994); https://doi.org/10.1117/12.166852

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