15 February 1994 Automatic defects classification for photolithographics reticles
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© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Denis M. Rigaill, Denis M. Rigaill, Henry Roussel-Dupre, Henry Roussel-Dupre, Michel Tissier, Michel Tissier, Yann Guerin, Yann Guerin, } "Automatic defects classification for photolithographics reticles", Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); doi: 10.1117/12.167264; https://doi.org/10.1117/12.167264
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