Die-to-database inspection using high accuracy database representation

Nissim Elmaliach; Yair Eran; Shiree Shafrir; Carla Thoe; Patricia D. Beard

doi:10.1117/12.167263

15 February 1994 Die-to-database inspection using high accuracy database representation

Nissim Elmaliach, Yair Eran, Shiree Shafrir, Carla Thoe, Patricia D. Beard

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Proceedings Volume 2087, 13th Annual BACUS Symposium on Photomask Technology and Management; (1994) https://doi.org/10.1117/12.167263
Event: 13th Annual BACUS Symposium on Photomask Technology and Management, 1993, Santa Clara, CA, United States

Abstract

The relation between the accuracy of the database representation and the inspection quality is discussed. In order to visualize the problems, a simplified model of an inspection machine is described. Using this model various aspects of database accuracy are presented. It is shown that some of the conventional methods for digitization of trapezoids, e.g. Brezenham method, may cause pixel-positioning errors and dropouts between figures. A better approach that is based on high precision subpixel addressing is proposed and its implication on reducing the database inaccuracy is proved.

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Nissim Elmaliach, Nissim Elmaliach, Yair Eran, Yair Eran, Shiree Shafrir, Shiree Shafrir, Carla Thoe, Carla Thoe, Patricia D. Beard, Patricia D. Beard, } "Die-to-database inspection using high accuracy database representation", Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); doi: 10.1117/12.167263; https://doi.org/10.1117/12.167263

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