1 February 1993 Fibre optic shape-measuring system using phase-stepping speckle-pattern interferometry
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Proceedings Volume 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application; (1993) https://doi.org/10.1117/12.168060
Event: Laser Dimensional Metrology: Recent Advances for Industrial Application, 1993, Brighton, United Kingdom
Abstract
A non-contact shape measuring system using fiber optics and digital speckle pattern interferometry (DSPI) is described. Fringe patterns for obtaining the height distributions of the shape are generated by traversing one of the illumination beams. The system utilizes a 4-step phase stepping algorithm to perform the data reduction. A semi-automatic procedure for calibrating the piezoelectric phase shifting device is reported. The equations for calculating the surface height are stated and typical results for two specimens are shown. Advantages and limitations of the technique and the optical system used are discussed.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lewis S. Wang, Lewis S. Wang, Brian N. Dobbins, Brian N. Dobbins, K. Jambunathan, K. Jambunathan, Xiaoping Wu, Xiaoping Wu, } "Fibre optic shape-measuring system using phase-stepping speckle-pattern interferometry", Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); doi: 10.1117/12.168060; https://doi.org/10.1117/12.168060
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