New design of an optical profiler

John A. Meiling Jr.; Shaun Coles

doi:10.1117/12.168068

1 February 1993 New design of an optical profiler

John A. Meiling Jr., Shaun Coles

Proceedings Volume 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application; (1993) https://doi.org/10.1117/12.168068
Event: Laser Dimensional Metrology: Recent Advances for Industrial Application, 1993, Brighton, United Kingdom

Abstract

New software algorithms are presented which extend the measurement capabilities of phase measurement microscopes without employing exotic hardware. Efficient methods for averaging data and compensating for common electrical artifacts produce measurements of 0.2 Angstroms rms instrument noise, regardless of the orientation of the interference pattern. A method for calculating the fringe order for each phase data point allows measurement of discontinuous surfaces without the usual phase unwrapping problems.

Citation Download Citation

John A. Meiling Jr. and Shaun Coles "New design of an optical profiler", Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); https://doi.org/10.1117/12.168068

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