1 February 1993 Subnanometre precision closed-loop positioning for optics and X-Y stage control using capacitance displacement sensors and piezo-electric actuators
Author Affiliations +
Proceedings Volume 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application; (1993) https://doi.org/10.1117/12.168064
Event: Laser Dimensional Metrology: Recent Advances for Industrial Application, 1993, Brighton, United Kingdom
Abstract
A closed-loop positioning system is described which is capable of sub-nanometer precision over displacements of up to 100 micrometers. The technique utilizes piezo-electric or electrostrictive translators in conjunction with capacitance displacement sensors. It has been applied in optical interferometry for path length control to picometer precision, and in X-Y stages developed for scanning probe microscopy.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Newrick K. Reay, Newrick K. Reay, } "Subnanometre precision closed-loop positioning for optics and X-Y stage control using capacitance displacement sensors and piezo-electric actuators", Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); doi: 10.1117/12.168064; https://doi.org/10.1117/12.168064
PROCEEDINGS
10 PAGES


SHARE
Back to Top