15 February 1994 Charge-buildup damage to gate oxide
Author Affiliations +
Abstract
`Antenna' structures over thick oxide were used to detect charge buildup damage to gate oxide, and gate leakage was measured to characterize the extent of damage. Polycide, metal 1, and metal 3 antennas with both area-intensive and edge-intensive configurations were included. After processing through a full triple-level metal, 135 angstroms gate oxide, 0.6 micrometers CMOS flow, individual 5 micrometers X 1 micrometers transistors (over gate oxide which had been stressed by the charge collected through an attached antenna during wafer fabrication) were measured and considered damaged if a current > 1 nA leaked through the oxide when a 5.5 V stress was applied to the gate during testing.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Calvin Gabriel, Calvin Gabriel, } "Charge-buildup damage to gate oxide", Proc. SPIE 2091, Microelectronic Processes, Sensors, and Controls, (15 February 1994); doi: 10.1117/12.167344; https://doi.org/10.1117/12.167344
PROCEEDINGS
9 PAGES


SHARE
RELATED CONTENT


Back to Top