Real-time image analysis and control of the solid/liquid interface during zone-melting recrystallization of thin films

Peter Y. Wong; Ioannis N. Miaoulis

doi:10.1117/12.167356

15 February 1994 Real-time image analysis and control of the solid/liquid interface during zone-melting recrystallization of thin films

Peter Y. Wong, Ioannis N. Miaoulis

Author Affiliations +

Proceedings Volume 2091, Microelectronic Processes, Sensors, and Controls; (1994) https://doi.org/10.1117/12.167356
Event: Microelectronic Processing '93, 1993, Monterey, CA, United States

Abstract

Thermal processing, a necessary step in the fabrication of most microelectronic devices, is used to improve the material quality of thin films. One example of thermal processing of thin films is Zone- Melting Recrystallization with a radiant line heat source. A line heater, situated above the film, heats a narrow region beyond its melt point creating a molten zone. As the line heater is moved slowly over the film, the material in the wake of the moving molten zone freezes in the form of a single crystal. The morphology of the solid/liquid interface strongly influences the resultant quality of the crystal. A planar morphology, in fact, produces a poor quality film which contains branching dislocations. A cellular morphology produces the highest quality films with limited point of line defects. In-situ observations of the crystalline quality can be made by examining the solid/liquid interface morphology. The real-time image analysis of the interface and the closed-loop control of the process are described in this paper.

Citation Download Citation

Peter Y. Wong and Ioannis N. Miaoulis "Real-time image analysis and control of the solid/liquid interface during zone-melting recrystallization of thin films", Proc. SPIE 2091, Microelectronic Processes, Sensors, and Controls, (15 February 1994); https://doi.org/10.1117/12.167356

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