10 August 1994 Interferometer with phase modulation for displacement sensor testing
Author Affiliations +
Proceedings Volume 2097, Laser Applications; (1994) https://doi.org/10.1117/12.183151
Event: Laser Optics, 1993, St. Petersburg, Russian Federation
Phase modulation interferometer with the phase difference computed from the ratio of the first and second harmonics amplitudes has been developed. Signal distortions and deviations of measuring conditions against normal conditions are analyzed and appropriate corrections are made. The instrumental error of small displacement measurements is equal to +/- 0.8 nm (0.95). The digital readout interval is of 1 nm.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander A. Andreev, Alexander A. Andreev, Lev N. Butenko, Lev N. Butenko, Alexander G. Seregin, Alexander G. Seregin, Ilya Sh. Etsin, Ilya Sh. Etsin, } "Interferometer with phase modulation for displacement sensor testing", Proc. SPIE 2097, Laser Applications, (10 August 1994); doi: 10.1117/12.183151; https://doi.org/10.1117/12.183151


Back to Top