Alignment measurement with laser diode

Shu-Yuan Ma; Jinwen Liang

doi:10.1117/12.156299

22 September 1993 Alignment measurement with laser diode

Shu-Yuan Ma, Jinwen Liang

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156299
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The alignment technique is very important to the field of geometrical measurements, especially for large scale measurements. This technique can be used to solve a lot of problems found in size or profile measurements. At present the light beam of He-Ne laser is mainly used in the alignment devices. In such devices, the light beam drift and the mechanisms distortion caused by temperature change of light source is one of the main factors affecting the alignment precision. This paper presents an alignment device with laser diode. Since the laser diode has advantages of small size and easy use, and the temperature can be controlled easily, so the alignment precision can be obtained easily and the apparatus will become compact. The paper showed the influence of temperature change on the alignment precision and the methods of temperature control. Thea alignment precision was evaluation to be 1x10-6 from the results of experiments.

Citation Download Citation

Shu-Yuan Ma and Jinwen Liang "Alignment measurement with laser diode", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156299

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