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22 September 1993 Capacitive inclination sensor made of quartz
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156439
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
Fused quartz is characterized by extreme low coefficient of linear expansion , small elastic hysteresis and good stability. Thus , it is an ideal material for sensor. A capacitive inclination sensor i s presented in this paper ,whose sensing element is made of fused quartz and fixed plates are made of invar. So it has very small temperature shift. The sensor uses differential structure to reduce non-linearity and improve sensitivity. Its mass block is supported by a flexibility bridge. Therefore , friction, wearing and moving due to the gap in supports are avoided. The design work and experiment results are given in the paper.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Feng Yuan, Qi-Shan Wang, Cheng-Bin Wang, and Maosheng Cao "Capacitive inclination sensor made of quartz", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156439
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