22 September 1993 Grating interference technology and its application
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156500
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
Grating interference technology because of its many advantages has been developed greatly in the field of fine metrology. The principle and characteristics of grating interference are analyzed and examples of its successful application are given.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tie-Bang Xie, Tie-Bang Xie, Bin Liu Zhao, Bin Liu Zhao, Dong-Lian Zheng, Dong-Lian Zheng, "Grating interference technology and its application", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156500; https://doi.org/10.1117/12.156500
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