High-accuracy measurement of dimensional minichanges of large-size components with laser interferometry

Jun Xu; YiBao Yuan; Zhen-Liang Ding; Hua Li; Zhong Chen

doi:10.1117/12.156256

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22 September 1993 High-accuracy measurement of dimensional minichanges of large-size components with laser interferometry

Jun Xu; YiBao Yuan; Zhen-Liang Ding; Hua Li; Zhong Chen

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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156256
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

This paper studies laser intcricroniclric mcasurcnicnt methods For detecting thc dimensional niinichangcs of largcsizc COIllpOllCfltS points OUt that thc dcadpath error is a niain error factor ifl flicasurenlefli and analyzcs the rcla tio nslup bet vccn the dcadpa th error a ni cnvironnicnta Cond itions. A special vacti tuil pipChas hCCn dCSignC(1 I 0 red nec the dead jiih c FF()r t fl d lo r I in iii (1 i ni en si on Ch a iigcs ni ens u reni cii I ace u racy o F 1c1 icr th an 3 x IO8rclativc to the length oF large component (or dcadpath) is obtained from 1 5t2 to 25t.

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Jun Xu, YiBao Yuan, Zhen-Liang Ding, Hua Li, and Zhong Chen "High-accuracy measurement of dimensional minichanges of large-size components with laser interferometry", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156256