High-precision laser interferometer for length metrology

Jiajing Pi; Li-Zhuan Zhao; Jian-Guo Du; Wei-Guo Shen

doi:10.1117/12.156509

22 September 1993 High-precision laser interferometer for length metrology

Jiajing Pi, Li-Zhuan Zhao, Jian-Guo Du, Wei-Guo Shen

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156509
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The instrument of type JLY-100 is a standing laser interferometer the wavelength of He-20Ne frequency stabilized laser is used as the standard of length metrology. The temperatures of environment and measurand are measured by a crystal thermometer. The measuring results affected by the environmental parameters can be automatically corrected by a microprocessor. The measuring range of instrument is 0-100 mm. The absolute measuring error is +O. 5L)tm where L is the length of the measurand in meter and the relative accuracy is y 1 x 106.

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Jiajing Pi, Li-Zhuan Zhao, Jian-Guo Du, and Wei-Guo Shen "High-precision laser interferometer for length metrology", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156509

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