22 September 1993 Measurement and evaluation of the damaged layer on a surface ground at ultrathin depth
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156291
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
The damaged layer on a ground surface is one of the important criteria for evaluating the surface quality of a workpiece. In the case of an ultra-thin depth grinding (UTDG) a very thin damaged layer has been obtained. A parameter expressing the microstructure of the damaged layer is given by the material density which is related to the acoustic parameter on the material surface. A V(z) curve from which the Rayleigh wave velocity and the total power can be calculated is gotten by using an acoustic microscope. On the basis of the above the damaged layer on a ground surface can be evaluated. KEY WORDS: Ultra-thin depth grinding Damaged layer Material density Evaluation Rayleigh wave V(z) curve 0.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Liang-Fu Xie, Liang-Fu Xie, Hong-Hai Zhang, Hong-Hai Zhang, Shang-Ping Li, Shang-Ping Li, Feng Zhu, Feng Zhu, Ri-Yao Chen, Ri-Yao Chen, Qi-Kui Huang, Qi-Kui Huang, } "Measurement and evaluation of the damaged layer on a surface ground at ultrathin depth", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156291; https://doi.org/10.1117/12.156291
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