22 September 1993 Measurement and rectification of the response characteristic of piezoelectric transducers
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156292
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
The piezoelectric transducer ( PZT for short ) is widely used in precision measurement as an actuator or a sensor1 . While developing the noncontact measuring instrument of disk surface roughness we employed PZT as the actuator of phasemodulation. It has been confirmed that the actuator is satisfactory in realizing precision measurement of the surface roughness with roughness Ra from 0. 16 to 0. 01 m. This paper primarily presents the measurement and rectification of the response characteristics of PZT after briefly introducing the design and process. The experiments and analysis show that the linearity of the response characteristics could be improved to 1. 08 by applying a suitable series capacitor which gives good precision support for the instrument. KEY WORDS: Precision measurement Measuring technique Rectification
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ju-Xiang Wang, Ju-Xiang Wang, Zhu Li, Zhu Li, Jiangming Ni, Jiangming Ni, Xiandeng Pei, Xiandeng Pei, } "Measurement and rectification of the response characteristic of piezoelectric transducers", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156292; https://doi.org/10.1117/12.156292
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