Paper
22 September 1993 Measurement of straight-motion accuracy
Akira Shimokohbe, Kaiji Sato, Akira Toyama, Joji Yamaguchi
Author Affiliations +
Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156297
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
Ultra-precision machine components such as linear motion tables and rotary bearings are necessary to realize ultra-precision mechanisms and machines. In order to produce these components the evaluation of their accuracy is essential. This paper describes a measuring method of straight motion accuracy of a linear table with one meter working length. The method is based on the sequential three-point one but in the method it is possible to eliminate the influence of the zero-inequality of sensors. The method also makes use of merits of the conventional reversal one but there is no need to reverse a long straightedge.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Akira Shimokohbe, Kaiji Sato, Akira Toyama, and Joji Yamaguchi "Measurement of straight-motion accuracy", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156297
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KEYWORDS
Sensors

Motion measurement

Solids

Antimony

Laser sources

Analytical research

Error analysis

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