22 September 1993 Measurement principle and error analysis for an optical heterodyne profilometer
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156295
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
In this paper an optical profilometer based on the principle of heterodyne interferometry has been developed. A new optical path design with a two-parallel-path is presented. This instrument will be insensitive to the vibration the air turbulence and no high precision reference surface is needed. The measurement results show that the vertical resolution is better than mm and the lateral resolution is less than 1 I. L m. Based on this design we also analyze its potential errors such as the error caused by the distance between two parallel optical paths that caused by the phase detection system and those casued by the optical design and others. The stability and the repeatability of the instrument are also evaluated.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tao Chen, Zhu Li, Jiabi Chen, "Measurement principle and error analysis for an optical heterodyne profilometer", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156295; https://doi.org/10.1117/12.156295
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