22 September 1993 Method using an optical needle to measure complex surface roughness and form errors
Author Affiliations +
Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993); doi: 10.1117/12.156304
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
By cabining organically the principle of astiatic location with the grating interferometery and the computer technology, an effective method for measuring the complex surface roughness and form error is put forward in this paper
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wen-Ming Yao, Shu-Wen Cao, Zhu Li, Tie-Bang Xie, "Method using an optical needle to measure complex surface roughness and form errors", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156304; https://doi.org/10.1117/12.156304
PROCEEDINGS
5 PAGES


SHARE
KEYWORDS
Surface roughness

Diffraction

Diffraction gratings

Optical testing

Photodetectors

Computing systems

Head

Back to Top