Microdisplacement generator for calibration

Bin Li; Chong Liu; Zhu Li

doi:10.1117/12.156309

22 September 1993 Microdisplacement generator for calibration

Bin Li, Chong Liu, Zhu Li

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156309
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

A simple and real-time micro-displacement generator is presented, which is aimed to calibrate or make comparisonwith those micro-size measuring instruments such as capacitive and inductive transducrs, heterodyne interferameters, etc. . The resolution of the generator is 2nm and the accuracy is within 5 nm.

Citation Download Citation

Bin Li, Chong Liu, and Zhu Li "Microdisplacement generator for calibration", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156309

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