22 September 1993 Nanometer movement and metrology -- a review of realization methods
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156312
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
Precision nanometre movement or positioning is of great significance in micro-engineering. It is concerned with the application of techniques developed in the electronics sector for the manufacture of miniature components with dimensions or tolerances in the region of 1 m likely down to nanometre level. Nanometre metrology performs verifying tasks for such a small displacement and ensures its reliability. In this paper the development of realisation methods for nanometre movement and the related methods of measurement is reviewed with respect of physical principles and technology. Piezoelectric actuators and electromagnetic actuators are typical drivers of small displacement. They are stated in this paper. This paper also presents some specific methods of measurement for small dimension and displacement such as laser heterodyne interferometer x-ray interferometer SEM STM and AFM. The newly developing high technology called nanotechnology is introduced by means of research situation in world wide.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hong Wei, Hong Wei, E. J. Davis, E. J. Davis, Kenneth J. Stout, Kenneth J. Stout, } "Nanometer movement and metrology -- a review of realization methods", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156312; https://doi.org/10.1117/12.156312
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