22 September 1993 Non-contact surface roughness measurement
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156333
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
A noncontact optical profiler for measuring surface roughness is described. The system consists of a differential interference microscope with a polarization phase shifter CCD detector array video frame grabber and computer. Interferometric phaseshifting techniques are used to obtain surface slope information. The slope data is then integrated to yield a surface profile. Vibration insensitivity has been achieved by adopting a differential interferometric scheme. The profiler has measured surface features with a vertical resolution of 1 nm and a lateral resolution of less than 0. 5 m in an ordinary laboratory environment without vibration isolation.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hong Gao, Hong Gao, Shifu Xue, Shifu Xue, Qingxiang Li, Qingxiang Li, Puchiang Yan, Puchiang Yan, "Non-contact surface roughness measurement", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156333; https://doi.org/10.1117/12.156333
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