22 September 1993 Novel cantilever-beam field-emission pressure sensor
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156490
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Due to an increasing interest in the study of field emission emitters for vacuum microelectronic devices a variety of new designs on cold cathodes were reported. In this paper we will report a novel pressure sensor utilizing the field-emission from two cantilever beams on a thin pressure sensitive silicon diaphragm. A simulation of the normalized output current as a funcfion of applied pressure is presented. Results of experimental cantilever-beam field-emission pressure sensor and some of the emission phenomena are reported.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ruey-Shing Star Huang, Ruey-Shing Star Huang, Hsien-Chung Lee, Hsien-Chung Lee, Mark Gross, Mark Gross, C. M. Horwitz, C. M. Horwitz, } "Novel cantilever-beam field-emission pressure sensor", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156490; https://doi.org/10.1117/12.156490


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