Research on the small-sized high-resolution radial grating

Hong-Lin Yu

doi:10.1117/12.156375

22 September 1993 Research on the small-sized high-resolution radial grating

Hong-Lin Yu

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156375
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The author of this paper has adopted a new high-accuracy main shaft rotation numerical phase locking automatic regulation system at the ultra-precision radial grating generating machine, designed a new kind of photoetch-system of cylindrical 'honeycomb' lens, and advanced a new high -speed carving method, The small-sized high-resolution radial grating has been developed, with a carving diameter of less than 50mm and the number of carved lines is about 32768 line couplesThe greatest diameter error is le2s than 0. 5sec, of arc even error is less than 5 per cent,

Citation Download Citation

Hong-Lin Yu "Research on the small-sized high-resolution radial grating", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156375

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