22 September 1993 Super precise measurement system controlled by computer in a servo writer
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156408
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
The paper gives a realization of the positioning system in a servo-writer, and discusses the Super Precise Measurement System controlled by a computer in detail. It gives a parallel 16-bit interface circuit with higher data transmission ratio, and analyses the facters which affect the measurement accuracy. The measurement accuracy of the system for the position is O.O2μm.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lian Xing Jia, Lian Xing Jia, Shengsheng Yu, Shengsheng Yu, Zhimin Yuan, Zhimin Yuan, } "Super precise measurement system controlled by computer in a servo writer", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156408; https://doi.org/10.1117/12.156408
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