22 September 1993 Super precise measurement system controlled by computer in a servo writer
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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156408
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
The paper gives a realization of the positioning system in a servo-writer, and discusses the Super Precise Measurement System controlled by a computer in detail. It gives a parallel 16-bit interface circuit with higher data transmission ratio, and analyses the facters which affect the measurement accuracy. The measurement accuracy of the system for the position is O.O2μm.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lian Xing Jia, Lian Xing Jia, Shengsheng Yu, Shengsheng Yu, Zhimin Yuan, Zhimin Yuan, "Super precise measurement system controlled by computer in a servo writer", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156408; https://doi.org/10.1117/12.156408
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