30 August 1993 Characterization of Ch-plasmas with CSR based microwave spectrometers
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Proceedings Volume 2104, 18th International Conference on Infrared and Millimeter Waves; 210463 (1993) https://doi.org/10.1117/12.2298651
Event: 18th International Conference on Infrared and Millimeter Waves, 1993, Colchester, United Kingdom
Abstract
In this paper the experimental analysis of plasmas suitable for thin film deposition using a highresolution mm-wave spectrometer is reported.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Wolf, F. Wolf, } "Characterization of Ch-plasmas with CSR based microwave spectrometers", Proc. SPIE 2104, 18th International Conference on Infrared and Millimeter Waves, 210463 (30 August 1993); doi: 10.1117/12.2298651; https://doi.org/10.1117/12.2298651
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