30 August 1993 Characterization of Ch-plasmas with CSR based microwave spectrometers
Author Affiliations +
Proceedings Volume 2104, 18th International Conference on Infrared and Millimeter Waves; 210463 (1993) https://doi.org/10.1117/12.2298651
Event: 18th International Conference on Infrared and Millimeter Waves, 1993, Colchester, United Kingdom
Abstract
In this paper the experimental analysis of plasmas suitable for thin film deposition using a highresolution mm-wave spectrometer is reported.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Wolf, F. Wolf, "Characterization of Ch-plasmas with CSR based microwave spectrometers", Proc. SPIE 2104, 18th International Conference on Infrared and Millimeter Waves, 210463 (30 August 1993); doi: 10.1117/12.2298651; https://doi.org/10.1117/12.2298651
PROCEEDINGS
2 PAGES


SHARE
RELATED CONTENT

Diamond-like carbon thin films prepared by rf-plasma CVD
Proceedings of SPIE (October 31 1991)
Optical and Other Properties of MPACVD Diamond
Proceedings of SPIE (March 31 1990)
Optical and other properties of MPACVD diamond
Proceedings of SPIE (July 31 1990)
Diamond films grown from fullerene precursors
Proceedings of SPIE (December 07 1995)
Update on diamond and diamond-like carbon coatings
Proceedings of SPIE (September 30 1990)

Back to Top