30 November 2017 Characterisation of hydrogenated silicon nitride films by low temperature FTIR spectroscopy
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Proceedings Volume 2104, 18th International Conference on Infrared and Millimeter Waves; 210473 (2017) https://doi.org/10.1117/12.2298687
Event: 18th International Conference on Infrared and Millimeter Waves, 1993, Colchester, United Kingdom
Abstract
Low temperature FTIR spectroscopy of hydrogenated siliconnitride films revealed many molecular species which are notobserved at ambient temperature. The broad band at 700-1100 cnisplits into three bands at 744, 825 and 890 cm-1 at 50K. Similar- ly NH group gives strong absorption band at low temperature.
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M. M. Pradhan, M. M. Pradhan, } "Characterisation of hydrogenated silicon nitride films by low temperature FTIR spectroscopy", Proc. SPIE 2104, 18th International Conference on Infrared and Millimeter Waves, 210473 (30 November 2017); doi: 10.1117/12.2298687; https://doi.org/10.1117/12.2298687
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