Interference methods for surface roughness measurement

Oleg V. Angelsky; Peter P. Maksimyak

doi:10.1117/12.165389

10 December 1993 Interference methods for surface roughness measurement

Proceedings Volume 2108, International Conference on Holography, Correlation Optics, and Recording Materials; (1993) https://doi.org/10.1117/12.165389
Event: Holography, Correlation Optics, and Recording Materials, 1993, Chernivsti, Ukraine

Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop the methods for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion (sigma) (psi) O² < 1. The proposed diagnostic methods are applicable to surfaces with roughness period comparable to the radiation wavelength employed, thin plane-parallel plate surfaces, plane low-reflectance surfaces, and arbitrarily shaped surfaces. The sensitivity limit of the methods in measuring the standard deviation of surface profile from base line is about 0.003 micrometers .

Citation Download Citation

Oleg V. Angelsky and Peter P. Maksimyak "Interference methods for surface roughness measurement", Proc. SPIE 2108, International Conference on Holography, Correlation Optics, and Recording Materials, (10 December 1993); https://doi.org/10.1117/12.165389

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