10 December 1993 Interference methods for surface roughness measurement
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Proceedings Volume 2108, International Conference on Holography, Correlation Optics, and Recording Materials; (1993) https://doi.org/10.1117/12.165389
Event: Holography, Correlation Optics, and Recording Materials, 1993, Chernivsti, Ukraine
Abstract
The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop the methods for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion (sigma) (psi) O2 < 1. The proposed diagnostic methods are applicable to surfaces with roughness period comparable to the radiation wavelength employed, thin plane-parallel plate surfaces, plane low-reflectance surfaces, and arbitrarily shaped surfaces. The sensitivity limit of the methods in measuring the standard deviation of surface profile from base line is about 0.003 micrometers .
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Oleg V. Angelsky, Oleg V. Angelsky, Peter P. Maksimyak, Peter P. Maksimyak, } "Interference methods for surface roughness measurement", Proc. SPIE 2108, International Conference on Holography, Correlation Optics, and Recording Materials, (10 December 1993); doi: 10.1117/12.165389; https://doi.org/10.1117/12.165389
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