7 October 1993 Active optical systems for projection interferometry
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Proceedings Volume 2110, CIS Selected Papers: Metal Vapor Lasers and Their Applications; (1993) https://doi.org/10.1117/12.160516
Event: Metal Vapor Lasers and Their Applications: CIS Selected Papers, 1993, None, Russian Federation
Abstract
Different types of interferometers designed by authors and based on the active optical system with a copper-vapor brightness amplifier are considered. These devices are shown to make it possible to control the quality of multilayer films on semiconductor surfaces, to measure small elements of the relief with extremely high accuracy. Rather large objects can be measured as well (the field of view can have a diameter as large as 35 mm).
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. M. Bakiev, A. M. Bakiev, Pulat K. Khabibullayev, Pulat K. Khabibullayev, S. Kh. Valiev, S. Kh. Valiev, "Active optical systems for projection interferometry", Proc. SPIE 2110, CIS Selected Papers: Metal Vapor Lasers and Their Applications, (7 October 1993); doi: 10.1117/12.160516; https://doi.org/10.1117/12.160516
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