7 October 1993 Dark-field laser projection microscope in holographic interferometry
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Proceedings Volume 2110, CIS Selected Papers: Metal Vapor Lasers and Their Applications; (1993) https://doi.org/10.1117/12.160517
Event: Metal Vapor Lasers and Their Applications: CIS Selected Papers, 1993, None, Russian Federation
Abstract
We consider the application of active optical systems with metal vapor brightness amplifiers in holographic interferometry. The method is based on the scheme of a laser projection microscope with a dark-field object illumination. It enables one to obtain information about shape and size distortions of object surface topology elements with accuracy up to a fraction of an amplifier radiation wavelength.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. M. Bakiev, A. M. Bakiev, S. Kh. Valiev, S. Kh. Valiev, } "Dark-field laser projection microscope in holographic interferometry", Proc. SPIE 2110, CIS Selected Papers: Metal Vapor Lasers and Their Applications, (7 October 1993); doi: 10.1117/12.160517; https://doi.org/10.1117/12.160517
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