Photoacoustic spectro- and microscopy: new diagnostic methods for materials and devices for electronics

Ivan V. Blonskij; V. G. Grytz; V. F. Kozenev; V. A. Thoryk; V. V. Semenov

doi:10.1117/12.191990

31 October 1994 Photoacoustic spectro- and microscopy: new diagnostic methods for materials and devices for electronics

Ivan V. Blonskij, V. G. Grytz, V. F. Kozenev, V. A. Thoryk, V. V. Semenov

Proceedings Volume 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1994) https://doi.org/10.1117/12.191990
Event: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop, 1993, Kiev, Ukraine

Abstract

Structural schemes of photoacoustic microscope and photoacoustic spectrometer of original design are described and the results are presented on photoacoustic micro- and spectroscopy for porous silicon, high-temperature superconductors, layer semiconductors, elements of integrated circuits and other materials and devices for electronics.

Citation Download Citation

Ivan V. Blonskij, V. G. Grytz, V. F. Kozenev, V. A. Thoryk, and V. V. Semenov "Photoacoustic spectro- and microscopy: new diagnostic methods for materials and devices for electronics", Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); https://doi.org/10.1117/12.191990

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