Technique for studying thermodynamics of local influence laser radiation on thin films

Vyacheslav Vladimirov Ionov; D. A. Grinko; V. V. Teologov

doi:10.1117/12.191998

31 October 1994 Technique for studying thermodynamics of local influence laser radiation on thin films

Vyacheslav Vladimirov Ionov, D. A. Grinko, V. V. Teologov

Proceedings Volume 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1994) https://doi.org/10.1117/12.191998
Event: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop, 1993, Kiev, Ukraine

Abstract

A technique for determination of stimulated by laser radiation phase-transition thermodynamic parameters of film structures is proposed. The amorphous films of W,Mo,Ni and Fe oxides are examined. The influence of laser wavelength on the thermodynamic parameters of phase transition in nonequilibrium conditions of laser irradiation is shown. The thermodynamic parameters in equilibrium conditions of all known differential thermal analysis techniques may be received. The equipment and measurement techniques for structure formation examination with simultaneous use of Rayleigh scattering and differential thermal analysis methods of high sensitivity are developed.

Citation Download Citation

Vyacheslav Vladimirov Ionov, D. A. Grinko, and V. V. Teologov "Technique for studying thermodynamics of local influence laser radiation on thin films", Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); https://doi.org/10.1117/12.191998

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