Translator Disclaimer
28 July 1994 Damage thresholds and optical stabilities of fluoride HR coatings for 193 nm
Author Affiliations +
Abstract
We investigated the damage thresholds and optical stabilities of 193 nm fluoride HR coatings consisting of NdF3/Na3AlF6 and LaF3/Na3AlF3. These coatings were deposited on fused silica substrates by conventional electron beam (EB) and ion assisted deposition process (IAD). Damage thresholds of LaF3/Na3AlF6 HRs were significantly increased by laser conditioning procedure and low index overcoating when they were deposited by EB and low energy IAD process. NdF3/Na3AlF6 HRs showed negligible laser conditioning effect except certain few case, and had considerably lower damage thresholds than LaF3/Na3AlF6 HRs with conditioning (1.8 J/cm2). Optical stabilities of these HRs were significantly improved by low energy IAD process (50 - 100 eV) which had not harmful influence on damage thresholds.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takao Izawa, N. Yamamura, R. Uchimura, and T. Yakuoh "Damage thresholds and optical stabilities of fluoride HR coatings for 193 nm", Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); doi: 10.1117/12.180929; https://doi.org/10.1117/12.180929
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
Back to Top