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28 July 1994 Ion beam sputtering of optical coatings
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Abstract
Ion beam sputtering (IBS) is an easily controlled, energetic deposition process. Thin film coatings produced using IBS are superior in terms of scatter, absorption, losses and homogeneous optical properties. The process and properties of coatings produced using IBS will be discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. F. Stewart, Samuel M. Lu, Mohammad M. Tehrani, and C. Volk "Ion beam sputtering of optical coatings", Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); https://doi.org/10.1117/12.180878
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