Photothermal microscopy of defects and laser damage morphology in Al2O3/SiO2 dielectric mirror coatings for 248 nm

Axel Bodemann; Michael Reichling; Norbert Kaiser; Eberhard Welsch

doi:10.1117/12.180927

28 July 1994 Photothermal microscopy of defects and laser damage morphology in Al₂O₃/SiO₂ dielectric mirror coatings for 248 nm

Axel Bodemann, Michael Reichling, Norbert Kaiser, Eberhard Welsch

Author Affiliations +

Proceedings Volume 2114, Laser-Induced Damage in Optical Materials: 1993; (1994) https://doi.org/10.1117/12.180927
Event: Laser-Induced Damage in Optical Materials: 1993, 1993, Boulder, CO, United States

Abstract

The cw photothermal displacement technique (PDT) has been shown to be a useful tool for the characterization of optical coatings with high lateral resolution combined with an ultrahigh sensitivity. By micrometer resolved PDT-measurements on Al₂O₃/SiO₂ multilayer coatings we found that the non-damaged thin film systems contain a great amount of photothermal inhomogeneities (defects) with lateral sizes ranging from several micrometers to several ten micrometers that are not visible by optical microscopy. In most cases these areas of strongly enhanced displacement response originate from microdelamination, decreased thermal impedance at the film interface or absorption centers. Thermal inhomogeneities in the film normally play a minor role.

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Axel Bodemann, Michael Reichling, Norbert Kaiser, and Eberhard Welsch "Photothermal microscopy of defects and laser damage morphology in Al₂O₃/SiO₂ dielectric mirror coatings for 248 nm", Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); https://doi.org/10.1117/12.180927

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