Very high-damage threshold Al2O3/SiO2 dielectric coatings for excimer lasers

Norbert Kaiser; Hein Uhlig; Uwe B. Schallenberg; Bernhard Anton; Ute Kaiser; Klaus R. Mann; Eric Eva

doi:10.1117/12.180896

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28 July 1994 Very high damage threshold Al₂O₃/SiO₂ dielectric coatings for excimer lasers

Norbert Kaiser, Hein Uhlig, Uwe B. Schallenberg, Bernhard Anton, Ute Kaiser, Klaus R. Mann, Eric Eva

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Proceedings Volume 2114, Laser-Induced Damage in Optical Materials: 1993; (1994) https://doi.org/10.1117/12.180896
Event: Laser-Induced Damage in Optical Materials: 1993, 1993, Boulder, CO, United States

Abstract

In the EUREKA EU205 project the target products are industrial excimer lasers in the average power range of one kilowatt or more. The high power optical components and dielectric coatings have to be developed in close adaption to cavity design (optics), beam relay optics, mask imaging optics, and masks. Therefore, we used ultra low loss conventional e-beam evaporation for Al₂O₃/SiO₂ dielectric multilayers. Based on a fundamental coating technique, both multilayer mean background absorption and absorption at localized spikes have been reduced drastically. The resulting KrF laser damage threshold of HR coatings is 16 J/cm² (1-on-1, 30 ns, EMG-202-MSC). Measurements have been performed with an automated damage testing facility, being part of the EUREKA program. Multilayers have been characterized by Atomic Force Microscopy, Photothermal Microscopy, absorption measurements, and Spectroscopy of Sputtered Neutrals.

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Norbert Kaiser, Hein Uhlig, Uwe B. Schallenberg, Bernhard Anton, Ute Kaiser, Klaus R. Mann, and Eric Eva "Very high damage threshold Al₂O₃/SiO₂ dielectric coatings for excimer lasers", Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); https://doi.org/10.1117/12.180896

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